[IEEE 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Paris, France (2019.5.12-2019.5.15)] 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP) - Investigations of Aluminum Nitride based piezoelectric MEMS
- 作者Stiebing, Martin; Tavakolibasti, Majid; Stoeckel, Chris; Hiller, Karla; Wunderle, Bernhard
- 文件大小2321.33KB
- 发表时间2019
- DOI10.1109/DTIP.2019.8752638
- 页码1-5
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