Robust spin coating deposition process for paraffin phase-change films
- 期刊名称Microelectronic Engineering
- 作者Shah, Spandan; Ghassemiparvin, Behnam; Ghalichechian, Nima
- 卷第217卷
- 印刷ISSN0167-9317
- 文件大小2045.36KB
- 发表时间2019-09
- DOI10.1016/j.mee.2019.111121
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