Numerical simulation of surface diffusion motion and its application in MEMS fabrication
Zhang, Yujie; Zeng, Fan; Wong, Man; Xiang, Junping; Ye, Wenjing
- 期刊名称Journal of Physics: Conference Series
- 作者Zhang, Yujie; Zeng, Fan; Wong, Man; Xiang, Junping; Ye, Wenjing
- 卷第1303卷
- 印刷ISSN1742-6588
- 电子ISSN1742-6596
- 文件大小1091.57KB
- 发表时间2019-08
- DOI10.1088/1742-6596/1303/1/012024