[IEEE 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Seoul, Korea (South) (2019.1.27-2019.1.31)] 2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS) - Highly Sensitive 2D Thermoresistive Micro Calorimetric Flow Sensor by Using $0.35boldsymbol{mu}mathbf{m}$ CMOS MEMS Technology
Xu, Wei; Wang, Ruijie; Wang, Xiaoyi; Mousa, Basant; Lee, Yi-Kuen
- 作者Xu, Wei; Wang, Ruijie; Wang, Xiaoyi; Mousa, Basant; Lee, Yi-Kuen
- 文件大小2004.67KB
- 发表时间2019
- DOI10.1109/memsys.2019.8870857
- 页码716-719