Characterizing profile tilt of nanoscale deep-etched gratings via x-ray diffraction
- 期刊名称Journal of Vacuum Science & Technology B
- 作者Song, Jungki; Heilmann, Ralf K.; Bruccoleri, Alexander R.; Schattenburg, Mark L.
- 卷第37卷
- 期第6期
- 印刷ISSN2166-2746
- 电子ISSN2166-2754
- 文件大小3124.08KB
- 发表时间2019-11
- DOI10.1116/1.5119713
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