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Tuning Stress in Cu Thin Films by Developing Highly (111)-Oriented Nanotwinned Structure

Tuning Stress in Cu Thin Films by Developing Highly (111)-Oriented Nanotwinned Structure

Wang, I-Ju; Ku, Ching-Shun; Lam, Tu-Ngoc; Huang, E-Wen; Tu, K. N.; Chen, Chih

期刊名称Journal of Electronic Materials
作者Wang, I-Ju; Ku, Ching-Shun; Lam, Tu-Ngoc; Huang, E-Wen; Tu, K. N.; Chen, Chih
印刷ISSN0361-5235
电子ISSN1543-186X
文件大小2650.68KB
发表时间2019-11-12
DOI10.1007/s11664-019-07742-1

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