Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom

Holler, Mirko; Odstrcil, Michal; Guizar-Sicairos, Manuel; Lebugle, Maxime; Müller, Elisabeth; Finizio, Simone; Tinti, Gemma; David, Christian; Zusman, Joshua; Unglaub, Walter; Bunk, Oliver; Raabe, Jörg; Levi, A. F. J.; Aeppli, Gabriel

期刊名称Nature Electronics
作者Holler, Mirko; Odstrcil, Michal; Guizar-Sicairos, Manuel; Lebugle, Maxime; Müller, Elisabeth; Finizio, Simone; Tinti, Gemma; David, Christian; Zusman, Joshua; Unglaub, Walter; Bunk, Oliver; Raabe, Jörg; Levi, A. F. J.; Aeppli, Gabriel
卷第2卷
期第10期
电子ISSN2520-1131
文件大小2139.37KB
发表时间2019-10
DOI10.1038/s41928-019-0309-z
页码464-470

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Three-dimensional imaging of integrated circuits with macro- to nanoscale zoom