Multiple replication of hierarchical structures from polymer masters with anisotropy

Mayer, Andre; Rond, Johannes; Staabs, Johannes; Leifels, Miriam; Zajadacz, Joachim; Ehrhardt, Martin; Lorenz, Pierre; Sunagawa, Hiroki; Hirai, Yoshihiko; Zimmer, Klaus; Scheer, Hella-Christin

期刊名称Journal of Vacuum Science & Technology B
作者Mayer, Andre; Rond, Johannes; Staabs, Johannes; Leifels, Miriam; Zajadacz, Joachim; Ehrhardt, Martin; Lorenz, Pierre; Sunagawa, Hiroki; Hirai, Yoshihiko; Zimmer, Klaus; Scheer, Hella-Christin
卷第37卷
期第6期
印刷ISSN2166-2746
电子ISSN2166-2754
文件大小3473.66KB
发表时间2019-11
DOI10.1116/1.5120881

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Multiple replication of hierarchical structures from polymer masters with anisotropy