[IEEE 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Lausanne, Switzerland (2019.7.14-2019.7.19)] 2019 IEEE International Symposium on Applications of Ferroelectrics (ISAF) - Vibrating Piezoelectric Energy Conversion Efficiency of Sol-Gel PZT Films with Various Crystal Orientations on MEMS Buckled Diaphragm Structures
Yamashita, Kaoru; Nakajima, Shota; Shiomi, Jo; Noda, Minoru; Muralt, Paul
- 作者Yamashita, Kaoru; Nakajima, Shota; Shiomi, Jo; Noda, Minoru; Muralt, Paul
- 文件大小782.01KB
- 发表时间2019
- DOI10.1109/isaf43169.2019.9034932
- 页码1-4