A FinFET with one atomic layer channel

Chen, Mao-Lin; Sun, Xingdan; Liu, Hang; Wang, Hanwen; Zhu, Qianbing; Wang, Shasha; Du, Haifeng; Dong, Baojuan; Zhang, Jing; Sun, Yun; Qiu, Song; Alava, Thomas; Liu, Song; Sun, Dong-Ming; Han, Zheng

期刊名称Nature Communications
作者Chen, Mao-Lin; Sun, Xingdan; Liu, Hang; Wang, Hanwen; Zhu, Qianbing; Wang, Shasha; Du, Haifeng; Dong, Baojuan; Zhang, Jing; Sun, Yun; Qiu, Song; Alava, Thomas; Liu, Song; Sun, Dong-Ming; Han, Zheng
卷第11卷
期第1期
电子ISSN2041-1723
文件大小1308.42KB
发表时间2020-12
DOI10.1038/s41467-020-15096-0

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A FinFET with one atomic layer channel