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[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Capacitive LamÃ© Mode Resonators in $65 mu mathrm{m}$-Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million

[IEEE 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Vancouver, BC, Canada (2020.1.18-2020.1.22)] 2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS) - Capacitive LamÃ© Mode Resonators in $65 mu mathrm{m}$-Thick Monocrystalline Silicon Carbide with Q-Factors Exceeding 20 Million

Yang, Jeremy; Hamelin, Benoit; Ayazi, Farrokh

作者Yang, Jeremy; Hamelin, Benoit; Ayazi, Farrokh
文件大小4912.08KB
发表时间2020
DOI10.1109/MEMS46641.2020.9056301
页码226-229

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