Characterization and Design Evaluation of Membrane-Based Calorimetric MEMS Sensors for Two-Dimensional Flow Measurement

• 期刊名称IEEE Sensors Journal
• 作者Hartgenbusch, Nico; Borysov, Mykhailo; Jedermann, Reiner; Lang, Walter
• 卷第20卷
• 期第9期
• 印刷ISSN1530-437X
• 电子ISSN1558-1748
• 文件大小4809.52KB
• 发表时间2020-5-1
• DOI10.1109/JSEN.2020.2965332
• 页码4602-4609