![Organometallic route to the chemical vapor deposition of titanium carbide films at exceptionally low temperatures]()
Organometallic route to the chemical vapor deposition of titanium carbide films at exceptionally low temperaturesGirolami, Gregory S.; Jensen, James A.; Pollina, Deborah M.; Allocca, Clare M.; Kaloyeros, Alain E.; Williams, Wendell S. · Journal of the American Chemical Society · 1987