![SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - <title>Smart-power metallization: issues, challenges, and opportunities (Abstract Only)</title>]()
SPIE Proceedings [SPIE Microelectronic Processing '92 - San Jose, CA (Sunday 20 September 1992)] Submicrometer Metallization: Challenges, Opportunities, and Limitations - <title>Smart-power metallization: issues, challenges, and opportunities (Abstract Only)</title>Shenai, Krishna; Kwok, Thomas; Kikkawa, Takamaro; Shenai, Krishna · 1993