Silicon Nitride by Using Stain Films on Silicon
- 期刊名称Japanese Journal of Applied Physics
- 作者Yamazaki, Syunpei; Kato, Yogoro; Taniguchi, Ichirou
- 卷第6卷
- 期第3期
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小928.12KB
- 发表时间1967-3
- DOI10.1143/JJAP.6.408
- 页码408-408
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