![Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase composition]()
Films of hydrogenated silicon oxycarbonitride. Part I. Chemical and phase compositionFainer, N. I.; Plekhanov, A. G.; Rumyantsev, Yu. M.; Maximovskii, E. A.; Shayapov, V. R.; Plekhanov, A. G.; Rumyantsev, Yu. M.; Maximovskii, E. A.; Shayapov, V. R. · Glass Physics and Chemistry · 2014