![Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transfer]()
Design and fabrication of a SAW device with Ta filled microcavities inserted into its delay path for improved power transferRichardson, Mandek; Cheemalapati, Surya; Everly, Richard; Sankaranarayanan, Subramanian K. R. S.; Pyayt, Anna; Bhethanabotla, Venkat R. · Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena · 2015