Quantifying delineation errors in thin film resistors I: Evaluation of linewidth errors from resistance measurements
- 作者A. Peled; M. Haspel
- 卷第93卷
- 印刷ISSN0040-6090
- 文件大小197.29KB
- 发表时间1982
- DOI10.1016/0040-6090(82)90151-1
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