Subject index
- 期刊名称Deep Sea Research Part B. Oceanographic Literature Review
- 作者Biassoni, Roberto; Raso, Alessandro
- 卷第31卷
- 期第9期
- 印刷ISSN0198-0254
- 文件大小8327.23KB
- 发表时间1984-1
- DOI10.1016/0198-0254(84)92793-6
Feature-scale model of Si etching in SF[sub 6] plasma and comparison with experimentsBelen, Rodolfo Jun; Gomez, Sergi; Kiehlbauch, Mark; Cooperberg, David; Aydil, Eray S. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2005
Feature scale model of Si etching in SF[sub 6]∕O[sub 2]∕HBr plasma and comparison with experimentsBelen, Rodolfo Jun; Gomez, Sergi; Kiehlbauch, Mark; Aydil, Eray S. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2006
Feature-scale model of Si etching in SF[sub 6]∕O[sub 2] plasma and comparison with experimentsBelen, Rodolfo Jun; Gomez, Sergi; Cooperberg, David; Kiehlbauch, Mark; Aydil, Eray S. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2005
In situ measurement of the ion incidence angle dependence of the ion-enhanced etching yield in plasma reactorsBelen, Rodolfo Jun; Gomez, Sergi; Kiehlbauch, Mark; Aydil, Eray S. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2006
Charge transport in magnetronsRossnagel, S. M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1987
Biomolecules and surfacesRatner, Buddy D. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1990
Studies in differential chargingBarr, Tery L. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1989
Material selection for hard coatingsHolleck, H. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1986
Hollow cathode magnetronWang, Zhehui; Cohen, Samuel A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1999
Nanostructured materials for supercapacitorsMeyyappan, M. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2013
Design of functional coatingsHegemann, D.; Oehr, C.; Fischer, A. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2005
Depth profile optimizationNaumkin, A. V. · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 1994