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Effects of deposition temperature on the oxidation resistance and electrical characteristics of silicon nitrideYoshimaru, M.; Inoue, N.; Tamura, H.; Ino, M. · 1994
Effects of Nitridation on the Characteristics of Silicon Dioxide: Dielectric and Structural Properties from ab initio CalculationsFischer, Dominik; Curioni, Alessandro; Billeter, Salomon; Andreoni, Wanda · 2004
The effects of gas flow rates on the etch characteristics of silicon nitride with an extreme ultra-violet resist pattern in CH2F2/N2/Ar capacitively coupled plasmasB.S. Kwon; J.H. Lee; N.-E. Lee · 2011