![SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - <title>Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications</title>]()
SPIE Proceedings [SPIE Optical Science and Technology, SPIE's 48th Annual Meeting - San Diego, CA (Sunday 3 August 2003)] Recent Developments in Traceable Dimensional Measurements II - <title>Metrological characterization of nanometer film thickness standards for XRR and ellipsometry applications</title>Hasche, Klaus; Thomsen-Schmidt, Peter; Krumrey, Michael; Ade, George; Ulm, Gerhard; Stuempel, Juergen; Schaedlich, Stefan; Frank, Wilfried; Procop, Mathias; Beck, Uwe; Decker, Jennifer E.; Brown, Nicholas · 2003