Development of a Large Bucket Plasma Source
- 期刊名称Japanese Journal of Applied Physics
- 作者Oka, Yoshihide; Guharay, Samar K.; Sakurai, Keiichi; Kaneko, Osamu; Kuroda, Tsutomu
- 卷第26卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小314.17KB
- 发表时间1987-7-20
- DOI10.1143/JJAP.26.1125
- 页码1125-1131
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