Fabrication of Submicron Grating Patterns Usinc Compositional Disordering of AlGaAs-GaAs Superlattices by Focused Si Ion Beam Implantation
- 期刊名称Japanese Journal of Applied Physics
- 作者Ishida, Koji; Miyauchi, Eizo; Morita, Tetsuo; Takamori, Takeshi; Fukunaga, Toshiaki; Hashimoto, Hisao; Nakashima, Hisao
- 卷第26卷
- 印刷ISSN0021-4922
- 文件大小654.01KB
- 发表时间1987-4-20
- DOI10.1143/JJAP.26.L285
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