海量图书期刊资源，随时随地畅享阅读乐趣
Growth and characterization of aluminium oxide thin films deposited from various source materials by atomic layer epitaxy and chemical vapor deposition processesL. Hiltunen; H. Kattelus; M. Leskelä; M. Mäkelä; L. Niinistö; E. Nykänen; P. Soininen; M. Tiittad · 1991