![Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonators]()
Experimental determination of the electro-acoustic properties of thin film AlScN using surface acoustic wave resonatorsKurz, Nicolas; Ding, Anli; Urban, Daniel F.; Lu, Yuan; Kirste, Lutz; Feil, Niclas M.; Žukauskaitė, Agnė; Ambacher, Oliver · Journal of Applied Physics · 2019