Carbonization Dynamics of Silicon Surfaces By Hydrocarbon Gas Molecular Beams
- 期刊名称MRS Proceedings
- 作者Yoshinobu, Tatsuo; Fuyuki, Takashi; Matsunami, Hiroyuki
- 卷第220卷
- 电子ISSN1946-4274
- 文件大小2572.57KB
- 发表时间1991-1
- DOI10.1557/proc-220-575
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