SPIE Proceedings [SPIE Design, Test, and Microfabrication of MEMS/MOEMS - Paris, France (Tuesday 30 March 1999)] Design, Test, and Microfabrication of MEMS and MOEMS - Microfabrication of biofactory-on-a-chip devices using laser ablation technologyTalary, Mark S.; Courtois, Bernard; Crary, Selden B.; Burt, Julian P.; Rizvi, Nadeem H.; Ehrfeld, Wolfgang; Fujita, Hiroyuki; Rumsby, Phil T.; Pethig, Ron; Karam, Jean Michel; Markus, Karen W. · 1999