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Structural, optical and electrical properties of SIPOS passivation layers

Structural, optical and electrical properties of SIPOS passivation layers

W. Füssel; W. Henrion; R. Scholz

作者W. Füssel; W. Henrion; R. Scholz
卷第22卷
印刷ISSN0167-9317
文件大小468.21KB
发表时间1993
DOI10.1016/0167-9317(93)90186-9
页码355-358

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