Characterization of the oxidation of tantalum nitride
- 作者A. O. Ibidunni; R. L. Masaitis; R. L. Opila; A. J. Davenport; H. S. Isaacs; J. A. Taylor
- 卷第20卷
- 期第7期
- 印刷ISSN0142-2421
- 电子ISSN1096-9918
- 文件大小568.55KB
- 发表时间1993
- DOI10.1002/sia.740200703
- 页码559-564
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