![Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence Technique]()
Spatial Distribution Measurement of Absolute Densities of CF and CF 2 Radicals in a High Density Plasma Reactor Using a Combination of Single-Path Infrared Diode Laser Absorption Spectroscopy and Laser-Induced Fluorescence TechniqueNakamura, Masayuki; Nakayama, Hirotaka; Ito, Masafumi; Hori, Masaru; Goto, Toshio; Kono, Akihiro; Ishii, Nobuo · Japanese Journal of Applied Physics · 1999