Novel Approach to Evaluation of Charging on Semiconductor Surface by Noncontact, Electrode-Free Capacitance/Voltage Measurement
- 期刊名称Japanese Journal of Applied Physics
- 作者Hirae, Sadao; Kohno, Motohiro; Okada, Hiroshi; Matsubara, Hideaki; Nakatani, Ikuyoshi; Kusuda, Tatsufumi; Sakai, Takamasa
- 卷第33卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小1572.65KB
- 发表时间1994-4-15
- DOI10.1143/JJAP.33.1823
- 页码1823-1830
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