Low-Temperature Si Epitaxy by Photochemical Vapor Deposition with $bf SiH_{2}Cl_{2}$
Oshima, Takayuki; Alonso, Juan Carlos; Yamada, Akira; Konagai, Makoto; Takahashi, Kiyoshi
- 期刊名称Japanese Journal of Applied Physics
- 作者Oshima, Takayuki; Alonso, Juan Carlos; Yamada, Akira; Konagai, Makoto; Takahashi, Kiyoshi
- 卷第33卷
- 印刷ISSN0021-4922
- 文件大小656.85KB
- 发表时间1994-2-1
- DOI10.1143/JJAP.33.L153