Epitaxial TiN based contacts for silicon devices
- 作者R. D. Vispute; J. Naeayan
- 卷第25卷
- 期第11期
- 印刷ISSN0361-5235
- 电子ISSN1543-186X
- 文件大小2119.65KB
- 发表时间1996-11
- DOI10.1007/s11664-996-0029-9
- 页码1740-1747
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