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Influence of Hydrogen Content and Si-H Bond Structure on Photocreated Dangling Bonds in Hydrogenated Amorphous Silicon Films

Zhang, Qing; Nishino, Takayuki; Takashima, Hideki; Kumeda, Minoru; Shimizu, Tatsuo

期刊名称Japanese Journal of Applied Physics
作者Zhang, Qing; Nishino, Takayuki; Takashima, Hideki; Kumeda, Minoru; Shimizu, Tatsuo
卷第35卷
印刷ISSN0021-4922
电子ISSN1347-4065
文件大小247.55KB
发表时间1996-8-15
DOI10.1143/jjap.35.4409
页码4409-4412