Statistical modeling for the optimal deposition of sputtered piezoelectric films
- 期刊名称IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
- 作者Hickernell, F.J.; Yue, R.-X.; Hickernell, F.S.
- 卷第44卷
- 期第3期
- 印刷ISSN0885-3010
- 文件大小859.76KB
- 发表时间1997-05
- DOI10.1109/58.658314
- 页码615-623
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