[IEEE 11th International Conference on Ion Implantation Technology - Austin, TX, USA (16-21 June 1996)] Proceedings of 11th International Conference on Ion Implantation Technology - Understanding implant damage by implant channeling profile measurements
- 作者Packan, P.; Kennel, H.; Thompson, S.; Corcoran, S.; Taylor, M.
- 文件大小357.52KB
- 发表时间1997
- DOI10.1109/iit.1996.586436
- 页码539-542
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