Boron out diffusion from Si substrates in various ambients
- 作者Kunihiro Suzuki; Hideki Yamawaki; Yoko Tada
- 卷第41卷
- 期第8期
- 印刷ISSN0038-1101
- 文件大小197.76KB
- 发表时间1997
- DOI10.1016/s0038-1101(97)00039-7
- 页码1095-1097
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