海量图书期刊资源，随时随地畅享阅读乐趣
Some effects of phosphorus doping in SiC:H films prepared using ECR-CVDR. Ji; S.F. Yoon; J. Ahn; W.I. Milne · 1997
The effect of microwave power on the deposition of boron-doped aSiC:H films using the electron cyclotron resonance methodS.F. Yoon; R. Ji; J. Ahn; W.I. Milne · 1996