Atomic-Layer Etching of a Br-Saturated Si(111)-7× 7 Surface by Using Scanning Tunneling Microscope
- 期刊名称Japanese Journal of Applied Physics
- 作者Mochiji, Kozo; Ichikawa, Masakazu
- 卷第38卷
- 印刷ISSN0021-4922
- 文件大小2081.07KB
- 发表时间1999-1-15
- DOI10.1143/JJAP.38.L1
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