A Comparative Study of Ti/Low-k HSQ (Hydrogen Silsesquioxane) and Ti/TEOS (Tetraethylorthosilicate) Structures at Elevated Temperatures
- 期刊名称MRS Proceedings
- 作者Zeng, Yuxiao; Chen, Linghui; Alford, T. L.
- 卷第612卷
- 电子ISSN1946-4274
- 文件大小212.73KB
- 发表时间2000-1
- DOI10.1557/proc-612-d9.13.1
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