An efficient treatment technique for TMAH wastewater by catalytic oxidation
- 期刊名称IEEE Transactions on Semiconductor Manufacturing
- 作者Hirano, K.; Okamura, J.; Taira, T.; Sano, K.; Toyoda, A.; Ikeda, M.
- 卷第14卷
- 期第3期
- 印刷ISSN0894-6507
- 文件大小101.05KB
- 发表时间2001
- DOI10.1109/66.939814
- 页码202-206
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