![Interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma investigated by in situ real-time infrared absorption spectroscopy]()
Interaction of hydrogen-terminated Si(100), (110), and (111) surfaces with hydrogen plasma investigated by in situ real-time infrared absorption spectroscopyShinohara, Masanori; Kuwano, Takayuki; Akama, Yosuke; Kimura, Yasuo; Niwano, Michio; Ishida, Hiroyasu; Hatakeyama, Rikizo · Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films · 2003