发现好书期刊，享受阅读乐趣

海量图书期刊资源，随时随地畅享阅读乐趣

One-Step Cleaning Solution to Replace the Conventional RCA Two-Step Cleaning Recipe for Pregate Oxide Cleaning

Pan, Tung Ming; Lei, Tan Fu; Chao, Tien Sheng; Liaw, Ming Chi; Ko, Fu Hsiang; Lu, Chih Peng

期刊名称Journal of The Electrochemical Society
作者Pan, Tung Ming; Lei, Tan Fu; Chao, Tien Sheng; Liaw, Ming Chi; Ko, Fu Hsiang; Lu, Chih Peng
卷第148卷
期第6期
印刷ISSN0013-4651
文件大小254.00KB
发表时间2001
DOI10.1149/1.1369374