Spatial Profile Measurements of Charged Particles in Capacitively-Coupled RF (13.56 MHz) Oxygen Discharges
- 期刊名称Japanese Journal of Applied Physics
- 作者Kaga, Kouji; Kimura, Takashi; Ohe, Kazuyuki
- 卷第40卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小54.75KB
- 发表时间2001-1-15
- DOI10.1143/JJAP.40.330
- 页码330-331
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