![SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV - Specialized hybrid batch fabrication process for MEMS RF voltage sensors]()
SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV - Specialized hybrid batch fabrication process for MEMS RF voltage sensorsTan, Hark Hoe; Dittmer, Jan; Judaschke, Rolf; Chiao, Jung-Chih; Faraone, Lorenzo; Büttgenbach, Stephanus; Jagadish, Chennupati; Williams, Jim; Wilson, Alan R. · 2007