![SPIE Proceedings [SPIE Smart Materials, Structures and MEMS - Bangalore, India (Wednesday 11 December 1996)] 1996 Symposium on Smart Materials, Structures, and MEMS - <title>Dynamical finite element models for MEMS and smart structures</title>]()
SPIE Proceedings [SPIE Smart Materials, Structures and MEMS - Bangalore, India (Wednesday 11 December 1996)] 1996 Symposium on Smart Materials, Structures, and MEMS - <title>Dynamical finite element models for MEMS and smart structures</title>Varadan, Vasundara V.; Lim, Young-Hun; Varadan, Vijay K.; Aatre, Vasu K.; Varadan, Vijay K.; Varadan, Vasundara V. · 1998