Organic-Inorganic Hybrid Type Electron Beam Resist.
- 期刊名称Journal of Photopolymer Science and Technology
- 作者Tamai, Toshiyuki; Matsuura, Yukihito; Matsukawa, Kimihiro; Inoue, Hiroshi; Hamamoto, Tetsuya; Toyota, Hiroshi; Satoh, Kazuo
- 卷第14卷
- 期第2期
- 印刷ISSN0914-9244
- 电子ISSN1349-6336
- 文件大小199.93KB
- 发表时间2001
- DOI10.2494/photopolymer.14.185
- 页码185-188
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