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[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - MEMS 3D optical mirror/scanner

[IEEE Comput. Soc International Conference on MEMS, NANO and Smart Systems - Banff, Alta., Canada (20-23 July 2003)] Proceedings International Conference on MEMS, NANO and Smart Systems - MEMS 3D optical mirror/scanner

Zhou, T.; Wright, P.; Crawford, J.; McKinnon, G.; Zhang, Y.

作者Zhou, T.; Wright, P.; Crawford, J.; McKinnon, G.; Zhang, Y.
文件大小1576.23KB
发表时间2003
DOI10.1109/icmens.2003.1221996
页码222-226

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