A Sealing Technique for Stacking MEMS on LSI Using Spin-Coating Film Transfer and Hot Pressing
- 期刊名称Japanese Journal of Applied Physics
- 作者Sato, Norio; Ishii, Hiromu; Shigematsu, Satoshi; Morimura, Hiroki; Kamei, Toshikazu; Kudou, Kazuhisa; Yano, Masaki; Machida, Katsuyuki; Kyuragi, Hakaru
- 卷第42卷
- 印刷ISSN0021-4922
- 电子ISSN1347-4065
- 文件大小434.40KB
- 发表时间2003-4-30
- DOI10.1143/JJAP.42.2462
- 页码2462-2467
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