SPIE Proceedings [SPIE Fourth International Symposium on laser Precision Microfabrication - Munich, Germany (Saturday 21 June 2003)] Fourth International Symposium on Laser Precision Microfabrication - Scribing characteristics of ceramics with Nd:YLF laser
Iwai, Y.; Mizuno, T.; Arai, T.; Honda, T.; Tanaka, Ryuzo; Takaoka, T.; Miyamoto, Isamu; Ostendorf, Andreas; Sugioka, Koji; Helvajian, Henry
- 作者Iwai, Y.; Mizuno, T.; Arai, T.; Honda, T.; Tanaka, Ryuzo; Takaoka, T.; Miyamoto, Isamu; Ostendorf, Andreas; Sugioka, Koji; Helvajian, Henry
- 卷第5063卷
- 印刷ISSN0277-786X
- 文件大小312.67KB
- 发表时间2003
- DOI10.1117/12.540744
- 页码509-513